发明名称 Semiconductor laser and manufacturing method therefor
摘要 A semiconductor laser adaptable for a 3-beam method, including a semiconductor laser chip bonded on a primary plane of a flat submount, the semiconductor laser chip having a thickness of 30 to 80 mu m is provided. Also provided is a method for manufacturing a semiconductor laser including the steps of: sequentially stacking layers of compound semiconductor materials on a semiconductor substrate to form a semiconductor laser wafer; mechanically abrading the semiconductor substrate to make it thin; subjecting the mechanically abraded face of the semiconductor substrate to a chemical treatment; forming an electrode film on both sides of the semiconductor laser wafer thus treated; and cutting the semiconductor laser wafer into chips and bonding each of the chips on a submount.
申请公布号 US5392304(A) 申请公布日期 1995.02.21
申请号 US19930069855 申请日期 1993.06.01
申请人 ROHM CO., LTD. 发明人 TANAKA, HARUO;MUSHIAGE, MASATO;KUSUNOKI, KAORU
分类号 H01S5/00;H01S5/02;H01S5/022;(IPC1-7):H01S3/04 主分类号 H01S5/00
代理机构 代理人
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