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发明名称
VERFAHREN ZUM HERSTELLEN VON HALBLEITERBAUELEMENTEN DURCH FORMGEBENDE BEHANDLUNG MIT EINER AETZLOESUNG
摘要
申请公布号
DE2430560(B2)
申请公布日期
1977.01.27
申请号
DE19742430560
申请日期
1974.06.26
申请人
发明人
分类号
H01L21/00;H01L21/306;H01L29/06;(IPC1-7):H01L21/306;C23F1/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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