发明名称 |
Haltevorrichtung für scheibenförmige Objekte |
摘要 |
The device (1) has two centrally mounted clamping arms (7) containing support surfaces (3) and pivotable gripper fingers (4) in which the gripper fingers are pretensioned by a support elements (15) in the holding position and are actuated by vacuum powered opening mechanism. The vacuum powered opening mechanism and the support elements are integrated in the central clamping arm fixture (2) or the clamping arms. |
申请公布号 |
DE102004036435(B4) |
申请公布日期 |
2007.08.30 |
申请号 |
DE20041036435 |
申请日期 |
2004.07.27 |
申请人 |
NANOPHOTONICS AG |
发明人 |
SIEBERT, SOENKE;SCHWEIGER, MICHAEL;LANG, ANDREAS |
分类号 |
B25B11/00;H01L21/683;B01L9/00;B23Q3/00;H01L21/68;H01L21/687 |
主分类号 |
B25B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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