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发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH06342781(A)
申请公布日期
1994.12.13
申请号
JP19930154258
申请日期
1993.05.31
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
NISHIDA TATSUYA
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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