HOME PORT, APPARATUS FOR TREATING SUBSTRATE INCLUDING THIS AND METHOD FOR COMPOSING ATMOSPHERE

摘要

The present invention relates to a home port in which a nozzle for discharging a processing solution stands by wherein the processing solution discharged by the nozzle is outputted through the home port and a substrate treatment device including the home port. According to an embodiment of the present invention, the home port comprises: a discharging space to which the nozzle discharges the processing solution; and an atmosphere composing unit configured to compose an atmosphere in the discharging space by an atmosphere composing solution. The atmosphere composing unit comprises a container accommodating the atmosphere composing solution and an ultrasonic wave applying member configured to apply ultrasonic wave vibration to the atmosphere composing solution accommodated in the container. The atmosphere composing solution sprayed by the ultrasonic wave applying member is directly supplied to the nozzle which stands by in the discharging space.