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发明名称
Novel resist material
摘要
申请公布号
GB0420700(D0)
申请公布日期
2004.10.20
申请号
GB20040020700
申请日期
2004.09.17
申请人
UNIV BIRMINGHAM
发明人
分类号
G03F7/038
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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