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发明名称
METODO PER MISURARE LO SPESSORE DI UNO STRATO DI SILICIO DANNEGGIATO DI ATTACCHI CON PLASMA
摘要
申请公布号
ITMI981504(A1)
申请公布日期
1999.12.30
申请号
IT1998MI01504
申请日期
1998.06.30
申请人
STMICROELETTRONICA SRL
发明人
SAVOIA CLAUDIO;ALBA SIMONE;BELLANDI ENRICO;CANALI FRANCESCA
分类号
G01B11/06;G01N21/21
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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