| 摘要 |
PURPOSE:To form a magnetic layer whose main components are Co and Cr having a easy magnetizing shaft in the vertical direction, on the surface of a film, by vacuum-depositing the vaporized atoms which have been put in a discharged state, on a substrate. CONSTITUTION:A water-cooled copper hearth 18 whose inside has been coated with a heat resisting insulator 29 is placed in a vacuum vessel 13, in this hearth 18 is contained a thin film material 11 whose main components are Co and Cr, atoms having a suitable value are supplied to an electronic gun 19, the material 11 is heated by an electronic beam 20, and is vaporized. And, voltage is applied to a probe 21 which has been placed between a basic material 2 and a vaporization source 17, a flowing current is measured, vaporized atoms being in a discharged state are vapor-deposited on the basic material 2, and a magnetic layer is formed. In this way, a vertical magnetized film which is excellent in a high-density recording characteristic can be obtaind stably on a basic material at such a high forming speed as thousands of Angstrom /sec. |
