| 发明名称 |
DISPLAY APPARATUS, APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS |
| 摘要 |
Provided are a display apparatus and an apparatus and method of manufacturing the display apparatus. The apparatus for manufacturing a display apparatus includes: a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate. |
| 申请公布号 |
US2016204364(A1) |
申请公布日期 |
2016.07.14 |
| 申请号 |
US201514730126 |
申请日期 |
2015.06.03 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Joo Hyunwoo;Ryu Sungwoo;Shim Jaewon;Yong Whanchae;Jung Sukwon;Huh Myungsoo |
| 分类号 |
H01L51/00;B05D1/02;H01L51/52;H01L27/32;H01L51/56;B05B7/00;C23C4/134 |
主分类号 |
H01L51/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for manufacturing a display apparatus, the apparatus comprising:
a dry cleansing unit configured to remove impurities from a surface of a mother substrate; an electrolyte treatment unit connected to the dry cleansing unit and configured to treat the surface of the mother substrate with electrolytes; and an exfoliated layer forming unit connected to the electrolyte treatment unit and configured to form an exfoliated layer on the mother substrate. |
| 地址 |
Yongin-City KR |
