发明名称 METHOD AND DEVICE FOR MEASURING BONDING STRENGTH
摘要 PURPOSE:To prevent the variance of measured value and to improve the reliability of measurement by placing a load by a motor in the shearing direction of a bonding part and measuring the value of the load by a load cell. CONSTITUTION:The pressing force of a blade 15 to a chip is adjusted with an adjusting screw 17. Here, the motor is driven to rotate a cam 19, thereby moving the whole support horizontally through a roller 20. Consequently, an arm 11, a rod 13, and a blade holder 14 move horizontally through the lower end of a load cell 10. The tip of the blade 10, therefore, presses a ball in the shearing direction. The current load is detected by the load cell 10 at all times and the load at the shearing time is securely measured. Further, the detected value of the load cell 10 is processed by a computer, etc., and the shearing load is measured. Here, the load of the tip of the blade 15 on the chip can be held constant by adjusting the adjusting screw 17, and variance in the measured value can be eliminated.
申请公布号 JPH02307039(A) 申请公布日期 1990.12.20
申请号 JP19890129332 申请日期 1989.05.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 TASHIRO NOBORU;HIROSE KIYOSHI;ISHIKAWA TAKATOSHI
分类号 G01N19/04;H01L21/60;H01L21/66 主分类号 G01N19/04
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