METHOD FOR REMOVING HALIDE IN RARE GAS

摘要

PURPOSE:To effectively remove a halide such as CF4 or SF6 from a rare gas such as krypton or xenon with a simple constitution. CONSTITUTION:Oxygen in a gaseous mixture is removed by extracting the gaseous mixture containing krypton, xenon and a halide from a krypton tower 10 and introducing to a deoxygenation tower 22. The halide contained in the remaining gas is made to react with calcium or magnesium to deposite as calcium halide or magnesium halide while heating the gas in a halide removing equipment 24. After that, the remaining gas is introduced into a separation tower 30 to rectify and high purity krypton and high purity xenon are refined.