Method for generating mask data, mask and computer readable recording media

摘要

A method is provided for generating mask data that is used for forming dummy convex regions in a specified pattern in a trench isolation region in a semiconductor device. Mask and computer readable recording medium are also provided. The method includes the steps of (a) setting a restriction region pattern 262 that defines a restriction region 40 in a semiconductor substrate, (b) setting dummy patterns 310 that define dummy convex regions 32, and (c) mixing the restriction region pattern 262 and the dummy patterns 310, wherein the dummy patterns 310 that at least partially overlap the restriction region pattern 262 are entirely excluded.