| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of solving the problem of stress caused by the difference between coefficients of thermal expansion and reducing noise. <P>SOLUTION: The acceleration sensor for detecting acceleration of triaxial directions in a three-dimensional coordinate system comprises a supporting frame integrally made of a semiconductor substrate and having four sides; a weight part positioned within the supporting frame; and four flexible parts each keeping one end connected to the weight part in such a way as to support the wight part and the other end connected to a center part of a corresponding side of the four sides each correspondingly to the four sides. Detection elements for detecting bending of the flexible parts according to acceleration exerted onto the wight part are each formed in the four flexible parts. A pair of joint parts formed with a gap are formed in each of the four sides of the supporting frame. The gap between the pair of joint parts formed in one side has prescribed lengths symmetric to the center part of the one side. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
