Patterning PEDOT:PSS layer by controlled electrochemical reaction

摘要

A method for monitoring a substrate patterning process, wherein at least two electrodes (2, 3) are used to apply a voltage to the substrate (1) to cause a reaction in a portion of the substrate, comprises recording a current driven by said voltage as a function of time and/or as a function of a position of the substrate (1) or a patterning mask.

<Paragraphs id="pa02" num="0002" xmlns:base="http://www.sipo.gov.cn/XMLSchema/base">Also disclosed are a device and a computer program product for monitoring the substrate patterning process.