发明名称 |
Probe resistance measurement method and semiconductor device with pads for probe resistance measurement |
摘要 |
A probe resistance measuring method includes measuring first resistances at three or more nodes by making contact at least a part of a plurality of probes of a probe unit with three or more pads for resistance measurement based on a first correspondence relation. The measured resistances are stored as a first measurement result and contact resistances of the plurality of probes of the probe unit are calculated based on the first measurement result.
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申请公布号 |
US2009008641(A1) |
申请公布日期 |
2009.01.08 |
申请号 |
US20080078781 |
申请日期 |
2008.04.04 |
申请人 |
NEC ELECTRONICS CORPORATION |
发明人 |
MICHIMATA SHIGETOMI;YANAGISAWA MASAYUKI;KUROYANAGI KAZUMASA |
分类号 |
G01R27/02;H01L23/58 |
主分类号 |
G01R27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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