发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device whose power line wiring resistance is small. SOLUTION: On this DRAM (dynamic random access memory) chip, a polysilicon wiring layer (p-Si) is used to form a line 3 of an external ground voltage ext.VSS, and first and second aluminum wiring layers (Al1, Al2) are used to form lines 4 and 5 of an external power voltage ext.VCC. Accordingly, as compared to the conventional way that the first aluminum wiring layer (Al1) has been used to form a line 76 of the external ground voltage ext.VSS, and the second aluminum wiring layer (Al2) has been used to form a line 77 of the external power voltage ext.VCC, the line wiring resistance value of the external power voltage ext.VCC can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004363624(A) 申请公布日期 2004.12.24
申请号 JP20040229364 申请日期 2004.08.05
申请人 RENESAS TECHNOLOGY CORP 发明人 YAMAZAKI KYOJI;ASAKURA MIKIO;YAMAUCHI TADAAKI
分类号 H01L21/3205;H01L21/8242;H01L23/52;H01L27/108;(IPC1-7):H01L21/824;H01L21/320 主分类号 H01L21/3205
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