| 摘要 |
PROBLEM TO BE SOLVED: To quickly and suitably conduct an analysis of the state of chemical bonds contained in a slight amount in a sample. SOLUTION: In such an X-ray photoelectron spectroscopic analytic method that the path energy of photoelectrons passing through an energy analyzer is uniformized, the path energy is set in accordance with the position of a peak of an inherent energy spectrum of the state of chemical bonds contained in a sample 2 to be analyzed and the half-value width of the peak, the peak position of another inherent energy spectrum of the state of chemical bonds that is closest to the energy spectrum and the half-value width of the peak, and the half-value width of a peak of an energy spectrum of an X-ray with which the sample is irradiated. COPYRIGHT: (C)2009,JPO&INPIT
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