Heating structure and inkjet printhead including the heating structure

摘要

A heating structure of an inkjet printhead and an inkjet printhead including the heating structure. The heating structure includes a substrate (110), a heater (114) formed on the substrate, an electrode (116) formed on the heater, a passivation layer (118) formed to cover the heaters and the electrodes, and carbon nanotubes (CNTs) (117) formed in the passivation layer.