SEMICONDUCTOR RADIATION DETECTOR AND INDUSTRIAL X-RAY CT EQUIPMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prevent or suppress deterioration of a characteristic of a semiconductor radiation detector when industrial X-ray CT equipment, and the semiconductor radiation detector arranged in it are used for as long time as five to ten years. SOLUTION: The semiconductor radiation detector is provided with a semiconductor crystal having an electrode and a substrate on which the semiconductor crystal is arranged. A crystal face protection means is disposed by leaving an interval from a face except for a face where the electrode of the semiconductor crystal is installed among outer surfaces constituting the semiconductor crystal. Deterioration of the characteristic of the semiconductor radiation detector is suppressed according to the present invention. COPYRIGHT: (C)2008,JPO&INPIT