发明名称 Laser oscillating apparatus
摘要 A plasma is excited uniformly as a whole over the length of each slot. A laser oscillating apparatus is designed to excite a laser gas in a laser tube (2) by introducing electromagnetic waves into the laser tube through a plurality of slots (10) formed in a waveguide wall and generate a laser beam by resonating the light generated from the laser gas. A least one electrode (13) is placed near the slot (10). By giving a predetermined current density to the electrode (13), the intensity distribution of light generated from the laser gas above the slot (10) is controlled. <IMAGE>
申请公布号 EP1032098(A3) 申请公布日期 2001.09.12
申请号 EP20000301521 申请日期 2000.02.25
申请人 TADAHIRO OHMI;CANON KABUSHIKI KAISHA 发明人 OHMI, TADAHIRO;SUZUKI, NOBUMASA;SHINOHARA, TOSHIKUNI;OHSAWA, HIROSHI;HIRAYAMA, MASAKI;TANAKA, NOBUYOSHI
分类号 H01L21/027;G03F7/20;H01S3/03;H01S3/0973;H01S3/0975;H01S3/225 主分类号 H01L21/027
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