HIGH EFFICIENCY THIN FILM SOLAR CELL AND MANUFACTURING METHOD AND APPARATUS THEREOF

摘要

A high efficiency thin film solar cell, a manufacturing method thereof and a manufacturing device are provided to improve energy conversion efficiency as a multiplicity of sublayers in which energy band gaps are different is formed inside an azygous intrinsic semiconductor layer. A manufacturing method of a high efficient solar cell comprises: a first step successively forming a first electrode and a first conductivity type semiconductor layer on a transparent substrate(ST12); a second step forming a light absorption layer consisting of a plurality of sublayers having different energy band gaps on the first conductivity type semiconductor layer(ST13); a third step forming a second electrical conduction semiconductor layer on the light absorption layer(ST15); and a fourth stage forming a second electrode on the second electrical conduction semiconductor layer(ST16).