An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Torroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8). Also claimed is a method of producing vanadium dioxide.
申请公布号
WO9216959(A1)
申请公布日期
1992.10.01
申请号
WO1992AU00125
申请日期
1992.03.25
申请人
COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH OR;SUTTON TOOLS PTY. LIMITED
发明人
MARTIN, PHILIP, JAMES;NETTERFIELD, ROGER, PRICE;KINDER, TERENCE, JOHN