| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room capable of providing a broad operation space while offering a sophisticated air cleaning action and easily installable by unitization. SOLUTION: The unit type clean room 1 comprises a machine room unit 2, a front room unit 6 and a clean room unit 10, and an air conditioner 5 and a fixed air capacity device 5a are installed in the machine room unit 2. The air conditioner 5 is connected to two HEPA filter units 12 installed in the clean room unit 10 via an air duct 13, and the fixed air capacity device 5a is connected to a return air chamber 15 installed in the clean room unit 10 via a return air duct 14, so as to circulate purified air to keep air inside the clean room clean all the time. A front room 7 and an air shower 9 are arranged in the front room unit 6. COPYRIGHT: (C)2009,JPO&INPIT
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