Graphene-metal E-fuse

摘要

A structure including an Mx level including a first Mx metal, a second Mx metal, and a third Mx metal abutting and electrically connected in sequence with one another, the second Mx metal including graphene, and an Mx+1 level above the Mx level, the Mx+1 level including an Mx+1 metal and a via, the via electrically connects the third Mx metal to the Mx+1 metal in a vertical orientation.

主权项

1. A method comprising:
forming an Mx level comprising a first Mx metal, a second Mx metal, and a third Mx metal abutting and electrically connected in sequence with one another, such that the third Mx metal abuts and is positioned between the first and second Mx metals, wherein the second and third Mx metals comprise graphene; and forming an Mx+1 level above the Mx level, the Mx+1 level comprising an Mx+1 metal and an Mx+1 via, the Mx+1 via electrically connecting the second Mx metal to the Mx+1 metal in a vertical orientation, wherein the Mx+1 via is adjacent to the third Mx metal and directly contacts the second Mx metal.