| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable liquid droplet ejection head which is excellent in dimensional accuracy and chemical resistance and can perform high-quality printing for a long period of time, and to provide a highly reliable liquid droplet ejector equipped with the liquid droplet ejection head. SOLUTION: The inkjet recording head 1 includes a substrate 20 in which ejection liquid storage chambers 21 are formed, a nozzle plate 10 prepared on the bottom surface of the substrate 20 and equipped with nozzle holes 11, and a sealing sheet 30 formed on the top surface of the substrate 20 to cover the ejection liquid storage chambers 21. The substrate 20 and the nozzle plate 10 are jointed to each other via a jointing film 15. The jointing film 15 is formed by the plasma polymerization method, including both an Si frame which has a random atomic structure including siloxane bonds, and desorption groups bonded to the Si frame. The substrate 20 and the nozzle plate 10 are jointed to each other by an adhesiveness manifested to the jointing film 15 when the desorption groups present near the surface of the jointing film 15 desorb from the Si frame by application of an energy. COPYRIGHT: (C)2009,JPO&INPIT
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