发明名称 Verfahren zur Züchtung von Siliziumkristall
摘要 The present invention is to provide a crucible for the growth of silicon crystal, which can enhance the productivity, yield and quality of crystal in the process of silicon crystal growth by Czochralski method, and a silicon crystal growing method by Czochralski method using said crucible. <??>A crucible for the growth of silicon crystal by Czochralski method having an inner bottom surface, the profile of which has at least a raised portion symmetrical about the rotary axis of the crucible wherein the periphery of the raised portion is positioned at a distance of from 0.4 to 1.2 times the radius of crystal to be grown from the rotary axis and the height of the raised portion is from not smaller than 7% to not greater than 100% of the radius of crystal to be grown.
申请公布号 DE602004008022(T2) 申请公布日期 2007.12.13
申请号 DE20046008022T 申请日期 2004.12.16
申请人 SILTRONIC AG 发明人 KISHIDA, YUTAKA;TAMAKI, TERUYUKI
分类号 C30B15/10;C30B29/06 主分类号 C30B15/10
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