发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To align an organic semiconductor layer without damaging the organic semiconductor layer by rubbing when the organic semiconductor having molecular orientation, and to provide a method of aligning the organic semiconductor layer without losing flatness of an interface between an insulating film and the organic semiconductor layer at rubbing of the insulating film. SOLUTION: In manufacturing of the organic semiconductor device, a second substrate in which an alignment layer is formed is so provided that the organic semiconductor layer contacts the alignment layer, to a first substrate comprising a gate electrode, a gate insulator layer, a source electrode, a drain electrode, and the organic semiconductor layer. The organic semiconductor layer is heated, or quenching or annealing is applied as well, to precisely align the organic semiconductor layer. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006156983(A) 申请公布日期 2006.06.15
申请号 JP20050313279 申请日期 2005.10.27
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 FURUKAWA SHINOBU
分类号 H01L29/786;H01L21/336;H01L51/05;H01L51/40 主分类号 H01L29/786
代理机构 代理人
主权项
地址