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发明名称
Chemical mechanical polishing method
摘要
申请公布号
EP1696011(B1)
申请公布日期
2009.01.07
申请号
EP20060110294
申请日期
2006.02.22
申请人
JSR CORPORATION
发明人
SHIDA, HIROTAKA;HATTORI, MASAYUKI
分类号
C09G1/02;H01L21/321
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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