发明名称 RADIATION SYSTEM
摘要 A radiation system comprising a beam splitting apparatus configured to receive a main radiation beam and split the main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.
申请公布号 WO2016139055(A3) 申请公布日期 2016.10.27
申请号 WO2016EP53216 申请日期 2016.02.16
申请人 ASML NETHERLANDS B.V. 发明人 NIENHUYS, Han-Kwang;BOGAART, Erik, Willem;DONKER, Rilpho, Ludovicus;KRUIZINGA, Borgert;LOOPSTRA, Erik, Roelof;BOTMA, Hako;DE VRIES, Gosse, Charles;FRIJNS, Olav, Waldemar, Vladimir;BASELMANS, Johannes, Jacobus, Matheus
分类号 G03F7/20;G02B5/02 主分类号 G03F7/20
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