MAGNETIC DEVICE, VAPOR DEPOSITION DEVICE AND VAPOR DEPOSITION METHOD

摘要

The present disclosure provides a magnetic device and a vapor deposition device. The magnetic device is configured to adsorb a metal mask in the vapor deposition device, including: a metal plate; an electromagnet array including a plurality of electromagnets; each of the electromagnets being inserted in the metal plate; a power supply module configured to supply a current; a control module configured to, when adsorbing the metal mask during a vapor deposition process, control the power supply module to supply a direct current to all or some of the plurality of electromagnets and control a direction and a size of the direct current by sending a first control signal to the power supply module.

主权项

1. A magnetic device for adsorbing a metal mask in a vapor deposition device, the magnetic device comprising:
a metal plate; an electromagnet array comprising a plurality of electromagnets, each of the electromagnets being inserted in the metal plate; a power supply module configured to supply a current; a control module configured to, when adsorbing the metal mask during a vapor deposition process, control, by sending a first control signal to the power supply module, the power supply module to supply a direct current to all or some of the plurality of electromagnets and control a direction and a size of the direct current.