| 发明名称 |
TEMPERATURE SENSITIVE LOCATION ERROR COMPENSATION |
| 摘要 |
A system that may include a movable support module for supporting an object and a controller, wherein the controller is configured to: receive an estimated location of a movable support module that supports an object and temperature information about an actual or estimated temperature of at least a portion of the object support module; and calculate movable support module location information, in response to (a) the estimated location of the movable support module, (b) the temperature information, and (c) a mapping between (i) values of the temperature information, (ii) estimated locations of the movable support module, and (iii) location errors of the movable support module |
| 申请公布号 |
US2016290786(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201514676571 |
申请日期 |
2015.04.01 |
| 申请人 |
APPLIED MATERIALS ISRAEL LTD. |
发明人 |
GRONAU Yuval;YEN Chun-Hsiang;DEE-NOOR Barak |
| 分类号 |
G01B11/00;H01L21/67;H01L21/687;F16M11/42 |
主分类号 |
G01B11/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system comprising:
a movable support module for supporting an object; and a controller configured to:
receive an estimated location of a movable support module that supports an object, and temperature information about an actual or estimated temperature of at least a portion of the object support module; andcalculate movable support module location information, in response to (a) the estimated location of the movable support module, (b) the temperature information and, (c) a mapping between (i) values of the temperature information, (ii) estimated locations of the movable support module, and (iii) location errors of the movable support module. |
| 地址 |
Rehovot IL |
