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发明名称
Neues Carbazolderivat und chemisch verstärkte strahlungsempfindliche Harzzusammensetzung
摘要
申请公布号
DE60234733(D1)
申请公布日期
2010.01.28
申请号
DE2002634733
申请日期
2002.03.05
申请人
JSR CORP.
发明人
NAGAI, TOMOKI;NUMATA, JUN;KUSUMOTO, SHIROU;KOBAYASHI, EIICHI
分类号
C07D209/86;C08F8/02;C08F8/30;C08F12/24;C08L25/18;G03F7/004;G03F7/038;G03F7/039;H01L21/027
主分类号
C07D209/86
代理机构
代理人
主权项
地址
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