| 发明名称 |
HIGH SILICON-CONTENT THIN FILM THERMOSETS |
| 摘要 |
High silicon-content resin composition that can be used to form thin film thermosets, useful in forming low k dielectric constant materials and as well as hard mask materials with anti-reflective properties for the photolithography industry are disclosed.
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| 申请公布号 |
KR20090028514(A) |
申请公布日期 |
2009.03.18 |
| 申请号 |
KR20087029521 |
申请日期 |
2008.12.02 |
| 申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
ABDALLAH DAVID J.;ZHANG RUZHI |
| 分类号 |
C08L83/04;C08K5/02;C09D183/04;G03F7/09 |
主分类号 |
C08L83/04 |
| 代理机构 |
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