| 摘要 |
PROBLEM TO BE SOLVED: To provide a position controller to be stably operated without generating the vibration of a low frequency even when the rigidity of a feed shaft driving system deteriorates in full close position control. SOLUTION: A deflection quantity Ps as a difference between a position detection value P1 of a driven body and a position detection value Pm of a motor is detected. A time constant Tp of a primary delay circuit which inputs a position arithmetic unit proportional constant Kp and the deflection quantity Ps and a time constant Tv of a primary circuit which inputs a difference between a speed detection value V1 of the driven body and a speed detection value Vm of the motor are varied according to the deflection quantity Ps. COPYRIGHT: (C)2007,JPO&INPIT
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