LED CHIP WITH INTEGRATED ELECTROMECHANICAL SWITCH

摘要

The invention provides an LED chip (22) having an integrated electrostatic switch (12) for electromechanical control of the LED. A suspended beam switch (12) floats above a conductive control electrode (10), and by a charging of the electrode (10) the beam (12) is attracted downward to make connection between an LED structure and an external electrode (20). Components are mounted on a common substrate (6) so that a fully integrated LED with MEMS switch is formed. Methods for producing the LED chip are further provided, wherein production of the switching mechanism is fully integrated with the production of the LED structure.