Pressure sensor, method of fabricating the same, and method of calibrating the same

摘要

A pressure sensor having a digital output includes a substrate formed with plural channels, and a gating part formed in such a way that an area confronting with the plural channels is spaced from the substrate and moved in response to an external pressure, thereby making the plural channels selectively conductive. Such a pressure sensor can obtain binary information of each channel from the fact that which is made to be conductive among the plural channels is detennined by the movement of the area formed in the gating part to confront with the plural channels, and it is possible to measure a pressure within a set range from binary information of each of the plural channels. As a result, because a peripheral circuit of the pressure sensor can be simplified, the manufacturing costs and power consumption can be greatly reduced.