发明名称 CAPACITY COUPLING TYPE DECOMPOSING DEVICE USING GLOW DISCHARGE
摘要 PURPOSE:To provide a titled device which enables the formation of photosensitive layer of a uniform film thickness on a rotating conductive drum by disposing a electrode plate concentrically with the drum and providing an ejection port and suction port for forming a gas for photosensitive layer. CONSTITUTION:In a device for forming a photosensitive layer on the circumferential surface of a rotating conductive drum 23 supported by a durm supporting plate 25 by introducing the forming gas for photosensitive layer supplied from tanks 1-4 through a main pipe 22 and blowing the same onto said surface by glow discharge in a reaction chamber 21, the 1st, the 2nd electrode plates 31, 32 of an arc shape are provided along the circumferential surface of the drum 23, and glow discharge is generated between the drum 23 and the electrode plates 31, 32 by a high frequency power source 26. A gas ejection pipe 28 is mounted on the outside surface of the plate 31 in the axial direction of the drum 23, and plural pieces of gas ejection ports are provided on the inside surface thereof. On other hand, a gas suction pipe 29 is mounted on the plate 32 and plural pieces of gas suction ports are provided thereto so as to face the center of the drum 23.
申请公布号 JPS58171564(A) 申请公布日期 1983.10.08
申请号 JP19820054564 申请日期 1982.03.31
申请人 MINOLTA CAMERA KK;KAWAMURA TAKAO 发明人 KAWAMURA TAKAO;MIZUNO HIROSHI
分类号 C23C16/50;C23C16/509;G03G5/08 主分类号 C23C16/50
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