| 摘要 |
PURPOSE:To reduce a spot diameter and to perform high-speed, high-precision deflection, by providing a relay lens means between an acoustooptic deflecting means and an objective and cutting off light of degree 0 from the deflecting means by a shielding means provided in the relay lens means. CONSTITUTION:A laser beam 8 emitted from a laser source 50 enters the acoustooptic deflecting means 1, which outputs deflected laser beams 10 and 11 to the 1st optical lens 2 of a relay lens 49. Then, they are focused at the rear- side focus position f1 of the 1st optical lens 2 and guided to the 2nd optical lens 4 and laser light passed through the 2nd optical lens 4 is corrected into parallel beams, which enter the objective lens 5. A slit 3, etc., is provided at the focus position between the 1st optical lens 2 and the 2nd optical lens 4, so light 9 of degree 0 and the deflected beams 10 and 11 are separated easily and laser light passed through the relay lens 49 is focused on a sample 6 through the objective 5. |
