发明名称 |
Thin-film solar cells and method of making |
摘要 |
There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.
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申请公布号 |
US2002127764(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20020056802 |
申请日期 |
2002.01.25 |
申请人 |
LOHMEYER MANFRED;BAUER STEFAN;DANIELZIK BURKHARD;MOHL WOLFGANG;FREITAG NINA |
发明人 |
LOHMEYER MANFRED;BAUER STEFAN;DANIELZIK BURKHARD;MOHL WOLFGANG;FREITAG NINA |
分类号 |
C23C16/24;C23C16/515;C23C16/56;H01L21/205;H01L31/04;H01L31/18;H01L31/20;(IPC1-7):H01L21/00;H01L21/84;H01L29/04 |
主分类号 |
C23C16/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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