METHOD OF TRANSFERRING ELEMENT, METHOD OF ARRANGING ELEMENT USING IT, AND METHOD OF MANUFACTURING IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To surely transfer very small elements arranged on a substrate to another substrate with accuracy. SOLUTION: The elements arranged on a first substrate and buried in an insulating material are selectively transferred to a second substrate. The elements and insulating material are simultaneously peeled from the first substrate by laser ablation by projecting laser light upon the elements and material from the rear surface side of the first substrate. In order to reinforce the elements and insulating material transferred to the second substrate, a resin layer is formed to cover the elements and material. After transfer, the first substrate is reutilized by removing residues by ashing the surface of the substrate with oxygen.