TAGAINIETSUCHISOKUDO NO KOTONARU SEKISOMAKUO ETSUCHINGUSURUHOHO,申请号JP19750016266-传众专利搜索

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发明名称	TAGAINIETSUCHISOKUDO NO KOTONARU SEKISOMAKUO ETSUCHINGUSURUHOHO
摘要
申请公布号	JPS5191671(A)	申请公布日期	1976.08.11
申请号	JP19750016266	申请日期	1975.02.10
申请人		发明人
分类号	C23F1/00;H01L21/306	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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