A spacer layer (7) with a cavity (8) etched out therein and a diaphragm (2) arranged thereabove on the spacer layer are located on a silicon substrate (1) with a doped region (5) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts (4, 6) to electronic components (13) that are likewise integrated in the substrate (1). The electronic component are a component part of the operating circuit that can also be used for the drive of the diaphragm and for evaluating the diaphragm oscillations. The integration makes it possible to arrange the micromachined transducer components as array that can be electronically driven as phased array.
申请公布号
WO9819140(A3)
申请公布日期
1998.07.09
申请号
WO1997DE02505
申请日期
1997.10.28
申请人
SIEMENS AKTIENGESELLSCHAFT;ECCARDT, PETER-CHRISTIAN;NIEDERER, KURT;SCHEITER, THOMAS;VOSSIEK, MARTIN;KOELPIN, THOMAS
发明人
ECCARDT, PETER-CHRISTIAN;NIEDERER, KURT;SCHEITER, THOMAS;VOSSIEK, MARTIN;KOELPIN, THOMAS