Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method,申请号US20010799153-传众专利搜索

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发明名称	Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
摘要	A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. A resonator is fabricated on a substrate, and its top electrode 56 is oxidized to form a oxide layer 58. For a substrate having multiple resonators, the top electrode 56 of only selected resonator is oxidized to provide resonators having different resonance frequencies on the same substrate.
申请公布号	US2002121944(A1)	申请公布日期	2002.09.05
申请号	US20010799153	申请日期	2001.03.05
申请人	LARSON JOHN D.;RUBY RICHARD C.;BRADLEY PAUL D.	发明人	LARSON JOHN D.;RUBY RICHARD C.;BRADLEY PAUL D.
分类号	H01L41/22;H01L41/08;H01L41/187;H03H3/04;H03H9/17;H03H9/56;(IPC1-7):H03H9/56	主分类号	H01L41/22
代理机构		代理人
主权项
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