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发明名称
PATTERN FORMATION
摘要
申请公布号
JPS6358839(A)
申请公布日期
1988.03.14
申请号
JP19860203152
申请日期
1986.08.29
申请人
SONY CORP
发明人
TAKEDA MINORU
分类号
H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01L21/302
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代理人
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