| 摘要 |
PURPOSE:To uniform the configuration of a recessed and protruding preformat, moreover, improve the durability by maintaining the recessing and protruding relations of a pattern on a recessed and protruding preformat pattern, and providing a sheath consisting of inorganic oxide which serves to relieve, and then smooth, the rectangular property of a pattern cross-section. CONSTITUTION:As the coating film of inorganic oxide, TiO2, SiO2, In2O3, SnO2, ZrO2, Al2O3 are used, and the solution of inorganic metallic oxide ester composite is applied on the recessed and protruding preformat pattern formed on a base material or the pattern forming layer provided on the base material, thereafter, dried and heated so as to form a coating film consisting of inorganic oxide. As the applying method of the solution, spinner coat, spray coat, soaking, bar coat, roll coat, gravure coat and the like are employed. Usually, the heating temperature should be chosen of such a range of 40-500 deg.C, and the heating time should be in 10 minutes-12 hours. The coating film thickness of the inorganic oxide may be in a range of 10-1,000Angstrom , particularly, it is preferable of 500-800Angstrom . |
