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发明名称
PROCESSOR
摘要
申请公布号
JPH07201824(A)
申请公布日期
1995.08.04
申请号
JP19930349833
申请日期
1993.12.29
申请人
TOKYO ELECTRON LTD
发明人
ISHIKAWA KENJI;KOMINO MITSUAKI
分类号
H01L21/302;H01L21/02;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
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