METHOD FOR FABRICATING SUPER OPTICAL PRISM FOR OPTICAL COMMUNICATION

摘要

PURPOSE: A method for fabricating a super optical prism for optical communication is provided which, achieves device characteristics improvement such as compactness and high speed and transmission efficiency. CONSTITUTION: According to the method, a bottom clad layer(2) and a core layer and a hard mask layer are deposited on a Si substrate(1) in sequence. A slave wave guide is formed by patterning a hard mask, after coating and patterning a PR on the hard mask layer. After coating a PR on the hard mask, a number of holes defined through masking operation are formed. Then, a hole is formed by etching the hard mask and the core layer to reveal the bottom clad layer on the same position as the hole using the PR where the hole is formed. A photonic crystal is formed by removing the PR and depositing one of a poly silicon or an amorphous silicon between the hard mask and the hole formed on the core layer. Then, a top clad layer(8) is formed on the whole surface.