System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing

摘要

A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.

主权项

1. A system for mapping a sample, comprising:
an optical microscope configured to:
generate three-dimensional coordinates for said sample based on at least three fiducial marks;receive said sample mounted in a holder; andtransmit said three-dimensional coordinates to a tool configured to navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.