| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro heater and a sensor, which suppress deterioration due to the heat of a measurement resistor measuring a temperature of a heat resistor, and can maintain a measurement accuracy of the heat resistor in an extended period.SOLUTION: A micro heater 500 comprises: a substrate 100 constituted by forming a cavity part 130 penetrating between a front surface and a bottom surface; a thin film part provided on the front surface of the substrate so as to close a front surface side of the cavity part and forming a diaphragm 150; a heat resistor 400 provided to the thin film part; and a measurement resistor 300 provided to the thin film part and measuring a temperature of the heat resistor. When viewing the micro heater in a thickness direction of the thin film part, the measurement resistor is positioned on the outer peripheral side of the thin film part than the heat resistor, and a shortest distance D1 of the heat resistor and the measurement resistor in a direction along the front surface of thin film part is longer than a shortest distance D2 of the measurement resistor and the outer peripheral edge of the diaphragm.SELECTED DRAWING: Figure 1 |
