| 摘要 |
The present invention relates to an end effector device 1 attached to a tip end portion of a robot arm, and the end effector device 1 includes a plurality of support units 3 provided on a blade 10. Each of the support units 3 includes: a plurality of nail pieces 30 configured to support peripheral portions of a plurality of semiconductor wafers 9 such that the semiconductor wafers 9 are parallel to one another and spaced apart from one another; and a pitch changing mechanism 4 configured to change upper-lower intervals of the nail pieces 30. The pitch changing mechanism 4 includes: a coil spring 40 configured to support the plurality of nail pieces 30 such that the plurality of nail pieces 30 are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism 5 configured to cause the coil spring 40 to elastically deform in the upper-lower direction. The operating mechanism 5 includes a piston pin 50 fitted in the coil spring 40 to move up and down. |
